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PFC Emission Reduction Partnerships

An Effective Practice

Description

EPA's Perfluorocarbon (PFC) Reduction/Climate Partnership for the semiconductor industry supports the industry's voluntary efforts to reduce high global warming potential (GWP) greenhouse gas emissions by following a pollution prevention strategy. The greenhouse gas emissions of primary concern are perfluorocarbons, trifluoromethane (CHF3), nitrogen trifluoride (NF3), and sulfur hexafluoride (SF6), collectively termed perfluorocompounds (PFCs).

Goal / Mission

EPA's partners have committed to reduce PFC emissions 10 percent below their 1995 baseline by 2010.

Results / Accomplishments

The world semiconductor industry has demonstrated significant commitment to
reducing PFC emissions. The U.S. semiconductor industry achieved the 10% reduction goal in 2003 and surpassed the goal in 2004, despite a significant increase in wafer demand over time.

About this Promising Practice

Organization(s)
US Environmental Protection Agency
Primary Contact
Sally Rand
US EPA PFC Reduction/Climate Partnership for the Semiconductor Industry
WC 6207J
1200 Pennsylvania Ave., NW
Washington, DC 20460
(202) 343-9739
rand.sally@epa.gov
http://www.epa.gov/semiconductor-pfc/
Topics
Environmental Health / Air
Environmental Health / Weather & Climate
Environmental Health / Toxins & Contaminants
Organization(s)
US Environmental Protection Agency
Date of publication
2006
Date of implementation
1995
Location
USA
Additional Audience
Semiconductor Industry